High fluence effects on ion implantation stopping and range

Articles > Article · 2004

Authors: S. Selvi, Z. Tek, A. Öztarhan, N. Akbaş, I.G. Brown

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, International, WoS, 2004, vol 229, pp 60-64

DOI: 10.1016/j.nimb.2004.11.015

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